Immersion deposition of metal films on silicon and germanium substrates in supercritical carbon dioxide Academic Article uri icon

Overview

publication date

  • 2003

has restriction

  • Copyright 2015 - Thomson Reuters. All rights reserved. You may not reproduce or redistribute this data in whole or in part without the written consent of Thomson Reuters.

Identity

Additional Document Info

start page

  • 83

end page

  • 91

volume

  • 15

issue

  • 1