Low-temperature deposition of Conformal copper films in supercritical CO2 by catalytic hydrogen reduction of copper hexafluoroacetylacetonate Academic Article uri icon

Overview

publication date

  • 2004

has restriction

  • Copyright 2015 - Thomson Reuters. All rights reserved. You may not reproduce or redistribute this data in whole or in part without the written consent of Thomson Reuters.

Identity

Additional Document Info

start page

  • 4028

end page

  • 4031

volume

  • 16

issue

  • 21