Enhanced actuation and acoustic transduction by pressurization of micromachined piezoelectric diaphragms Academic Article uri icon

Overview

publication date

  • 2010

has restriction

  • Copyright 2015 - Thomson Reuters. All rights reserved. You may not reproduce or redistribute this data in whole or in part without the written consent of Thomson Reuters.

Identity

Additional Document Info

start page

  • 164

end page

  • 172

volume

  • 161

issue

  • 1-2